Flow Range:0–15 SLPM
Accuracy:±(1.5% of reading + 0.5% of full scale)
Repeatability:±0.5% of full scale
Flow Range:0 - 2000 sccm
Accuracy:±(2.0 + 0.5FS)%
Range Ratio:100:1
Measurement Range:0–2 SLPM (Standard Liter per Minute)
Accuracy:±(1.5% + 0.2% F.S.)
Repeatability:±0.25%
Measurement Range:0–50 SLPM
Accuracy:±(2.0% + 0.5% F.S.)
Repeatability:±0.75%
Measurement Range:0–500 SLPM
Accuracy:±1.5% of Full Scale (F.S.)
Repeatability:±0.75%
Measurement Range:0 - 800 SLPM
Accuracy Grade:1.5% F.S
Nominal Diameter:19mm
Kekuatan:11.4 ~ 25.2v
Jangkauan:0,5 ~ 10,1,8 ~ 32,5 ~ 85,9 ~ 150l/mnt
Akurasi rentang penuh:x ± 1% (kisaran <50%)
Rentang Aliran:0 ~ 2000 ... 6000
Keakuratan:± (2,0+0,5fs)%
Rasio turn-down:> 100: 1
Untuk digunakan dengan:Gas kering
Jangkauan:+/- 200 cm/menit
Keakuratan:0,35%
Monitoring scope:500sccm
Accuracy:0.5%
Output voltage:4.5V
Penyimpangan output nol-titik:+30 mV
Pergeseran output:+0.12 %/OC
Catu daya bekerja:8-18VDC, 100mA
Jalur (n):2.3. 4. 5
Tingkat Aliran:10, 20, 30, 40, 50 SLPM
Rasio jangkauan:100:1