Rentang ukuran:0 ~ 300L/mnt
Keluaran:RS485
Ketepatan:± 3%FS
Laju aliran massa:0 - 1000 SCCM
Keakuratan:±(2 + 0.5 fs)%
Waktu merespon:8 msec
Tegangan suplai:4.75-5.25V
level tinggi:4VDD
Level rendah:0,8V
Output mode:Analog voltage (0.5 - 4.5VDC)
Interface type:M5 screw hole or JST electrical interface
Repeatability:±1.0%
Measuring Range:0 to 100%
Working Pressure:±100 mbar
Operating Temperature Range:15 to 40°C
Flow Range:0–15 SLPM
Accuracy:±(1.5% of reading + 0.5% of full scale)
Repeatability:±0.5% of full scale
Flow Range:0 - 2000 sccm
Accuracy:±(2.0 + 0.5FS)%
Range Ratio:100:1
Measurement Range:0–2 SLPM (Standard Liter per Minute)
Accuracy:±(1.5% + 0.2% F.S.)
Repeatability:±0.25%
Measurement Range:0–50 SLPM
Accuracy:±(2.0% + 0.5% F.S.)
Repeatability:±0.75%
Measurement Range:0–500 SLPM
Accuracy:±1.5% of Full Scale (F.S.)
Repeatability:±0.75%
Measurement Range:0 - 800 SLPM
Accuracy Grade:1.5% F.S
Nominal Diameter:19mm
Kekuatan:11.4 ~ 25.2v
Jangkauan:0,5 ~ 10,1,8 ~ 32,5 ~ 85,9 ~ 150l/mnt
Akurasi rentang penuh:x ± 1% (kisaran <50%)